May 2008 - TOOL Corp. Introduces a Unique Integrated Physical Model Simulation Environment　　

Tokyo, Japan - May 30, 2008 - TOOL Corp., a leading developer of EDA tools today announced the integration of KLA-Tencor’s LithoWare and TOOL’s versatile layout visualization platform, LAVIS. This successful integration provides users with accurate and fast OPC/RET development.

To develop the next node OPC/RET strategy and to monitor worst case CD variation for yield enhancement by addressing thecomplexity and challenge of sub-wave length resolution, it is unavoidable to use an accurate, rigorous physical model base simulator for some critical tasks. On the other hand, for more hotspot-prone topology coverage, data volume becomes an issue and limits the use of rigorous physical simulation based investigation. The new integrated environment of LithoWare and LAVIS, utilizes the industry "de-facto" standard PROLITH physical model, fully integrated within LithoWare, and LAVIS, TOOL Corp’s high capacity and performance layout handling platform, will fundamentally solve these issues. 

This integrated environment allows users to display full-chip level layout data, and conduct rigorous physical model investigation on selected areas in a seamless fashion. Results can be thoroughly investigated by overlaying and measuring OPC’d and the original patterns, and by predicted contours. By fully taking advantage of LithoWare’s model separability, users can change lithography and physical conditions without collecting and calibrating anther set of test pattern CD data, and visually predict possible issues during an early stage of the nascent process.

"Accurate, rigorous physical models are an essential tool for developing the next node OPC/RET strategy," said Chris Sallee, Senior Marketing and Sales Director of KLA-Tencor. "We are pleased that the integration of KLA-Tencor’s LithoWare and TOOL's LAVIS product can provide our mutual customers with a powerful OPC/RET development solution."

"We are pleased to be collaborating with KLA-Tencor to develop LithoWare and LAVIS integrated environment and that we can provide our mutual customers the best OPC/RET solutions," said Hideaki Hontao, president of TOOL. "We will continue working on integrating other LithoWare capability."

The LithoWare and LAVIS environment will be exhibited at the Design Automation Conference, June 9-12 in Anaheim, California.
 

About LithoWare

LithoWare is the first tool to turn to for next generation RET development and early OPC learning. The rigorous physicalmodels and distributed computing capabilities on Linux enable LithoWare to be the most powerful next generation lithography tool for advancing to, and beyond, the next node.

About LAVIS

LAVIS is a versatile and ultra-high speed layout visualization platform that supports large data and multiple file formats. Its unique display method, coupled with memory management technology, efficiently enables large volume data handlingand fast display. Most importantly, LAVIS can be used as a common standard layout platform for all the IC processes such as design, verification, mask data preparation, inspection and failure analysis, thanks to its capability to support various data formats, including GDSII, OASIS, LEF/DEF and e-beam thereby making it easy to interface with other tools for the entire IC making flow.

About TOOL

TOOL is a Japanese software development company focused primarily on EDA tool development. Its particular strength is in the area of layout design, and has scored a number of achievements in this area with its development tool, LAVIS. Solutions to chipmakers' problems can be provided by combining TOOL’s package-software with its custom-tailored software developed to serve a customer’s particular need. TOOL provides ample experience in this particular area. For more information on TOOL and products, please refer to http://www.tool-corp.com/.

Contact:

KLA-Tencor Corporation
Chris Sallee
Sales and Marketing Director
1-512-231-4210
Chris.Sallee@kla-tencor.com

TOOL Corporation
Asako Nakane
Marketing Group
+(81)-3-5723-8124
marketing@tool.co.jp